Class Descriptions

• EG 4090x Operations Course (with EG Commander)
  
• EG 4090x Maintenance Course
  
• EG 4090x Advanced Maintenance Course (under development)
  
• EG6000 Operations Course (with EG Lightning)
  
• EG6000 Maintenance Course
  
• EG6000 Advanced Maintenance Course (under development)

EG 4090X OPERATIONS COURSE (WITH EG COMMANDER)

The 5-day course provides detailed information on how to operate and program the Horizon 4090 series prober. The course is focused on the 4090u+ with coverage on the 4080/4090/4090u provided on 'as needed' basis. This course begins with an introduction to the probing system as it relates to the semiconductor industry, followed by orientation on system hardware and EG Commander control software. The hardware discussions familiarize the students with the descriptions, functions and operational characteristics of each major module. The EG Commander software exercises describe the step-by step progression through the screens used for calibrating and setting up the prober for the probing operation. The software overview also includes product file creation and setup concepts, probe card and device pad alignment, and wafer ID setup exercises. It is recommended that a scrap wafer be brought to the class for product file setup.

Target Audience

Operators, engineers and technicians.

Course Objectives

At the end of the course, each student shall be able to:

• Describe the purpose of a prober system.
• Locate and describe the major modules of the 4090 series prober.
• Describe the EG Commander control system.
• Systematically power up/down the 4090 series prober tool.
• Harbor the forcer, login, and perform system calibration.
• Navigate the various user interface screens.
• Profile and align wafer.
• Perform probe-to-pad alignment.
• Create product file containing lists, zones, die, wafer and lot recipes.
• Install probe card and probe the wafers.
• Run the tool in burn-in mode.
• Perform wafer recovery.

Prerequisites

AA degree in electronics/mechanical field, or equivalent military or technical school training, or minimum of six months practical operation/maintenance experience in the semiconductor industry.

Method

The course consists of five 8-hour sessions including lecture, lab and hands-on training.

Certificate of Completion

Certification is issued based upon attendance, class participation and satisfactory completion of the final examination.

top

EG 4090X MAINTENANCE COURSE

The 5-day course provides detailed coverage enabling participants to acquire new skills needed to maintain the Horizon 4090 series probers. It begins with System Overview followed by Power Distribution and Pneumatics System. Tracing of the Interconnect Diagrams gives a better perspective about component location and connections. Each major module, DCM, MHCM, PCM and VM is then covered to the board level. A detailed listing of the special tools and materials are discussed in preparation for the Annual Preventive Maintenance activities. Once the preventive maintenance is completed, leveling and planarization are performed followed by setting up of Tool Points. Upon satisfactory completion of Tool Points, the MACHINE folder is backed up and then the prober is operated in Burn-in mode.

Target Audience

Maintenance engineers/technicians and Field Service Engineers.

Course Objectives

At the end of the course, each student shall be able to:

• Locate and describe the main components of each module.
• Trace various systems functional and schematic diagrams.
• Trace applicable interconnect diagrams for the 4090, 4090u and 4090u+.
• Perform removal and installation of the Z-stage drive assembly.
• Perform platen and forcer cleaning and maintenance checks.
• Check/set carrier ring and optics bridge height and planarity.
• Calibrate profiler, optics bridge camera and DPS camera.
• Level prober and material handler components.
• Perform material handler mechanical adjustments
• Set Optical Wafer Scan (OWS for Mapping) parameters.
• Setup material handler and chuck tool points.
• Store and retrieve tool points.
• Verify OCR (Optical Character Recognition) Wafer ID operation.

Prerequisites

1. Satisfactory completion of an EG 4090x Operations course or equivalent knowledge of machine operation, and
2. AA degree in electronics/mechanical field, or equivalent military or technical school training, or minimum of six months practical operation/maintenance experience in the semiconductor industry.

Method

The course consists of five 8-hour sessions including lecture, lab and hands-on training.

Certificate of Completion

Certification is issued based upon attendance, class participation and satisfactory completion of the final examination.

top

EG6000 OPERATIONS COURSE (WITH EG LIGHTNING)

The 5-day course provides detailed information on how to operate and program the EG6000 series probers. This course begins with an introduction to the probing system as it relates to the semiconductor industry, followed by orientation on system hardware and EG Lightning control software. The hardware discussions familiarize the students with the descriptions, functions and operational characteristics of each major module. The EG Lightning software exercises describe the step-by step progression through the screens used for calibrating and setting up the prober for the probing operation. The software overview also includes product file creation and setup concepts, probe card and device pad alignment, and wafer ID setup exercises. It is recommended that a scrap wafer be brought to the class for product file setup.

Target Audience

Operators, engineers and technicians.

Course Objectives

At the end of the course, each student shall be able to:

• Describe the purpose of a prober system.
• Locate and describe the major modules of the EG6000 prober.
• Describe the EG Lightning control system.
• Systematically power up/down the EG6000 prober.
• Initialize gantry system, and perform system calibration.
• Navigate the various user interface screens.
• Profile and align wafer.
• Perform probe-to-pad alignment.
• Create product files containing lists, zones, die, wafer and lot recipes.
• Install probe card and probe the wafers.
• Run the tool in burn-in mode.
• Perform wafer recovery.

Prerequisites

AA degree in electronics/mechanical field, or equivalent military or technical school training, or minimum of six months practical operation/maintenance experience in the semiconductor industry.

Method

The course consists of five 8-hour sessions including lecture, lab and hands-on training.

Certificate of Completion

Certification is issued based upon attendance, class participation and satisfactory completion of the final examination.

top

EG6000 MAINTENANCE COURSE

The 5-day course enables participants to acquire new skills needed to maintain the EG6000 series probers. It begins with System Overview followed by tracing of the Interconnect Diagrams to give a better perspective about component location and connections. Each major module/system like Power Distribution, Pneumatics, Electronics Drawer and Gantry area is then covered in detail. A day of Heidenhain Encoder Setup is performed followed by Preventive and Corrective Maintenance activities. Once maintenance is completed, leveling and planarization are performed followed by Material Handler Setup. Upon satisfactory completion of MH Setup, the Robot Controller's ABM Robot and Prealign parameters are backed up into the EQT32 folder. The prober is then operated in Burn-in mode.

Target Audience

Maintenance engineers/technicians and Field Service Engineers.

Course Objectives

At the end of the course, each student shall be able to:

• Locate and describe the main modules (units) on the EG6000.
• Using the electrical and interconnect diagrams, locate electrical components and trace electrical signals throughout the prober.
• Check/set DC voltage levels.
• Identify components and trace the pneumatic and vacuum lines throughout the prober.
• Clean the gantry area including the linear encoder scales.
• Perform Heidenhain encoder setup.
• Disassemble and clean the Z-stage assembly.
• Disassemble and clean the Theta assembly.
• Verify Gantry drive operation after Preventive Maintenance and perform troubleshooting as required.
• Calibrate the DPS and optics bridge cameras.
• Level the prober and Material Handler components.
• Dock and undock load port and perform operational checks.
• Teach Material Handler (MH) tool points.
• Cycle wafers to verify tool operation.

Prerequisites

1. Satisfactory completion of an EG6000 Operations course or equivalent knowledge of machine operation, and
2. AA degree in electronics/mechanical field, or equivalent military or technical school training, or minimum of six months practical operation/maintenance experience in the semiconductor industry.

Method

The course consists of five 8-hour sessions including lecture, lab and hands-on training.

Certificate of Completion

Certification is issued based upon attendance, class participation and satisfactory completion of the final examination.

top